SNE 3200M

Both SE and BSE Detectors are included for SEM image analysis to enable diverse analysis for a wide variety of sample types. Both High and Low(charge reduction) Vacuum modes are standard allowing nonconductive sample analysis without metal coating.

Resolution

15nm

Magnification

60 000x

Multi Detector

SE / BSE

SECONDARY ELECTRONS (SE)

Create images with the high level information. Mostly used for surface inspection.

BACKSCATTERED
ELECTRONS (BSE)

Create images with material information (Elements).

CONVENIENCE

STAGE SYSTEM

X, Y, R (3-axis) Beam shift: 150μm

AUTO SETTING

Focus, Contrast, Brightness

Dual View Mode

SE/BSE Multi Display

Convenient stage movement by 3-axis and able to operate easily and conveniently with mouse control in U.I.
Able to check and save both SE/BSE Images together at the same time with dual view mode.

TECHNICAL DATA

RESOLUTION

15nm (30kV, SE Image)

20nm (30kV, BSE Image)

MAGNIFICATION

20x~60 000x

ACCELERATION VOLTAGE

1~30kV (1/5/10/15/20/30)

DETECTOR

Secondary electrons (SE)

Backscattered electrons (BSE)

ELECTRON GUN

Pre-centered Tungsten Filament Cartridge

STAGE TRAVERSE

3-axis System (X, Y, R, Z, T – Manual)

X, Y-axis: 35mm / R-axis: 360°

– Image Shift: ±150μm
– CCD Camera installed in the Chamber
– T-axis: 0 to 45˚ (Option)

MAX. SAMPLE SIZE

70 mm (Diameter) x 30 mm (Height)

AUTOMATION FUNCTION

Auto Start, Auto Focus, Auto Stigmator, Auto Contrast & Brightness

IMAGE FORMAT

BMP, JPEG, PNG, TIFF

VACUUM MODE

High & Low Vacuum

VACUUM PUMP

Rotary Pump
Turbo Molecular Pump (Full Automation)

DIMENSIONS

MAIN UNIT

 

Width: 390 mm
Depth: 380 mm
Height: 560 mm

Weight: 83 kg

CONTROLLER UNIT

Width: 390 mm
Depth: 325 mm
Height: 560 mm

Weight: 37 kg

ROTARY PUMP

Width: 400 mm
Depth: 160 mm
Height: 340 mm

Weight: 24 kg

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