Both SE and BSE Detectors are included for SEM image analysis to enable diverse analysis for a wide variety of sample types. Both High and Low(charge reduction) Vacuum modes are standard allowing nonconductive sample analysis without metal coating.
Resolution
15nm
Magnification
60 000x
Multi Detector
SE / BSE
SECONDARY ELECTRONS (SE)
Create images with the high level information. Mostly used for surface inspection.
BACKSCATTERED
ELECTRONS (BSE)
Create images with material information (Elements).
CONVENIENCE
STAGE SYSTEM
X, Y, R (3-axis) Beam shift: 150μm
AUTO SETTING
Focus, Contrast, Brightness
Dual View Mode
SE/BSE Multi Display
Convenient stage movement by 3-axis and able to operate easily and conveniently with mouse control in U.I.
Able to check and save both SE/BSE Images together at the same time with dual view mode.
TECHNICAL DATA
RESOLUTION
15nm (30kV, SE Image)
20nm (30kV, BSE Image)
MAGNIFICATION
20x~60 000x
ACCELERATION VOLTAGE
1~30kV (1/5/10/15/20/30)
DETECTOR
Secondary electrons (SE)
Backscattered electrons (BSE)
ELECTRON GUN
Pre-centered Tungsten Filament Cartridge
STAGE TRAVERSE
3-axis System (X, Y, R, Z, T – Manual)
X, Y-axis: 35mm / R-axis: 360°
– Image Shift: ±150μm
– CCD Camera installed in the Chamber
– T-axis: 0 to 45˚ (Option)
MAX. SAMPLE SIZE
70 mm (Diameter) x 30 mm (Height)
AUTOMATION FUNCTION
Auto Start, Auto Focus, Auto Stigmator, Auto Contrast & Brightness
IMAGE FORMAT
BMP, JPEG, PNG, TIFF
VACUUM MODE
High & Low Vacuum
VACUUM PUMP
Rotary Pump
Turbo Molecular Pump (Full Automation)
DIMENSIONS
MAIN UNIT
Width: 390 mm
Depth: 380 mm
Height: 560 mm
Weight: 83 kg
CONTROLLER UNIT
Width: 390 mm
Depth: 325 mm
Height: 560 mm
Weight: 37 kg
ROTARY PUMP
Width: 400 mm
Depth: 160 mm
Height: 340 mm
Weight: 24 kg