SNE 3000MS

The most economical model with optimized spectifications for easy SEM imaging. Able to image samples within 3 minutes from exchanging samples. Optional EDS is available also at entry level prices for precise elemental micro-analysis.

Resolution

15nm

Magnification

60 000x

SE Detector

SE Image

Secondary electrons (SE)

Create images with the high level information. Mostly used for surface inspection.

CONVENIENCE

Stage System

X, Y, R (3-axis) Beam Shift: 150μm

AUTO SETTING

Focus, Contrast, Brightness

SIMPLE S/W

Convenient Operation

Convenient stage movement by 3-axis and able to operate easily and conveniently with mouse control in U.I.
Able to get various analysis results with various scan modes measurement tool.

TECHNICAL DATA

RESOLUTION

15nm (30kV, SE Image)

MAGNIFICATION

20x~60 000x

ACCELERATION VOLTAGE

1~30kV (1/5/10/15/20/30)

DETECTOR

Secondary electrons (SE)

ELECTRON GUN

Pre-centered Tungsten Filament Cartridge

STAGE TRAVERSE

3-axis System (X, Y, R – Manual)

X, Y-axis: 40mm / R-axis: 360°

Tilt-axis: 0~45° (Option)

Image Shift: ±150μm

MAX. SAMPLE SIZE

70 mm (Diameter) x 30 mm (Height)

AUTOMATION FUNCTION

Auto Start, Auto Focus, Auto Stigmator, Auto Contrast & Brightness

IMAGE FORMAT

BMP, JPEG, PNG, TIFF

VACUUM MODE

High Vacuum

VACUUM PUMP

Rotary Pump
Turbo Molecular Pump (Full Automation)

DIMENSIONS

MAIN UNIT

 

Width: 390 mm
Depth: 380 mm
Height: 560 mm

Weight: 88 kg

CONTROLLER UNIT

Width: 390 mm
Depth: 325 mm
Height: 560 mm

Weight: 97 kg

ROTARY PUMP

Width: 400 mm
Depth: 160 mm
Height: 340 mm

Weight: 24 kg

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