The most economical model with optimized spectifications for easy SEM imaging. Able to image samples within 3 minutes from exchanging samples. Optional EDS is available also at entry level prices for precise elemental micro-analysis.
Resolution
15nm
Magnification
60 000x
SE Detector
SE Image
Secondary electrons (SE)
Create images with the high level information. Mostly used for surface inspection.
CONVENIENCE
Stage System
X, Y, R (3-axis) Beam Shift: 150μm
AUTO SETTING
Focus, Contrast, Brightness
SIMPLE S/W
Convenient Operation
Convenient stage movement by 3-axis and able to operate easily and conveniently with mouse control in U.I.
Able to get various analysis results with various scan modes measurement tool.
TECHNICAL DATA
RESOLUTION
15nm (30kV, SE Image)
MAGNIFICATION
20x~60 000x
ACCELERATION VOLTAGE
1~30kV (1/5/10/15/20/30)
DETECTOR
Secondary electrons (SE)
ELECTRON GUN
Pre-centered Tungsten Filament Cartridge
STAGE TRAVERSE
3-axis System (X, Y, R – Manual)
X, Y-axis: 40mm / R-axis: 360°
Tilt-axis: 0~45° (Option)
Image Shift: ±150μm
MAX. SAMPLE SIZE
70 mm (Diameter) x 30 mm (Height)
AUTOMATION FUNCTION
Auto Start, Auto Focus, Auto Stigmator, Auto Contrast & Brightness
IMAGE FORMAT
BMP, JPEG, PNG, TIFF
VACUUM MODE
High Vacuum
VACUUM PUMP
Rotary Pump
Turbo Molecular Pump (Full Automation)
DIMENSIONS
MAIN UNIT
Width: 390 mm
Depth: 380 mm
Height: 560 mm
Weight: 88 kg
CONTROLLER UNIT
Width: 390 mm
Depth: 325 mm
Height: 560 mm
Weight: 97 kg
ROTARY PUMP
Width: 400 mm
Depth: 160 mm
Height: 340 mm
Weight: 24 kg