SNE 4500m

The high resolving power allows real-time specimen inspection up to 100 000x.

Obtaining high quality images of extremely small features or particles is made possible by utilizing the standard Variable Aperture(30, 50, 100㎛) and optimal sample positioning with omnidirectional control of 5 axis stage.

Resolution

5nm

Magnification

100 000x

SE Detector

SE Image

SECONDARY ELECTRONS (SE)

Create images with the high level information. Mostly used for surface inspection.

BIO MEMBRANE – OLED

PLASTIC FIBER

CONVENIENCE

STAGE SYSTEM

X,Y,Z,R,T (5-axis) Beam Shift: 150μm

AUTO SETTING

Focus, Contrast, Brightness

SIMPLE S/W

Convenient Operation

The only Table-top SEM of which has 5-axis, enables simple and easy operation with unlimited movement of stage and mouse control system.
Able to get various analysis results with various scan modes measurement tool.

TECHNICAL DATA

RESOLUTION

5nm (30kV, SE Image)

MAGNIFICATION

20x~100 000x

ACCELERATION VOLTAGE

1~30kV (1/5/10/15/20/30)

DETECTOR

Secondary electrons (SE)

ELECTRON GUN

Pre-centered Tungsten Filament Cartridge

STAGE TRAVERSE

5-axis System (X, Y, R, Z, T – Manual)

X, Y-axis: 40 mm / R-axis: 360°

Z-axis : 0~35 mm / Tilt-axis : 0~45°

Image Shift: ±150μm

MAX. SAMPLE SIZE

80 mm (Diameter) x 35 mm (Height)

AUTOMATION FUNCTION

Auto Start, Auto Focus, Auto Stigmator, Auto Contrast & Brightness

IMAGE FORMAT

BMP, JPEG, PNG, TIFF

VACUUM MODE

High Vacuum (Low Vacuum Option)

VACUUM PUMP

Rotary Pump
Turbo Molecular Pump (Full Automation)

DIMENSIONS

MAIN UNIT

 

Width: 390 mm
Depth: 380 mm
Height: 560 mm

Weight: 88 kg

CONTROLLER UNIT

Width: 390 mm
Depth: 325 mm
Height: 560 mm

Weight: 97 kg

ROTARY PUMP

Width: 400 mm
Depth: 160 mm
Height: 340 mm

Weight: 24 kg

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