The high resolving power allows real-time specimen inspection up to 100 000x.
Obtaining high quality images of extremely small features or particles is made possible by utilizing the standard Variable Aperture(30, 50, 100㎛) and optimal sample positioning with omnidirectional control of 5 axis stage.
Resolution
5nm
Magnification
100 000x
SE Detector
SE Image
SECONDARY ELECTRONS (SE)
Create images with the high level information. Mostly used for surface inspection.
BIO MEMBRANE – OLED
PLASTIC FIBER
CONVENIENCE
STAGE SYSTEM
X,Y,Z,R,T (5-axis) Beam Shift: 150μm
AUTO SETTING
Focus, Contrast, Brightness
SIMPLE S/W
Convenient Operation
The only Table-top SEM of which has 5-axis, enables simple and easy operation with unlimited movement of stage and mouse control system.
Able to get various analysis results with various scan modes measurement tool.
TECHNICAL DATA
RESOLUTION
5nm (30kV, SE Image)
MAGNIFICATION
20x~100 000x
ACCELERATION VOLTAGE
1~30kV (1/5/10/15/20/30)
DETECTOR
Secondary electrons (SE)
ELECTRON GUN
Pre-centered Tungsten Filament Cartridge
STAGE TRAVERSE
5-axis System (X, Y, R, Z, T – Manual)
X, Y-axis: 40 mm / R-axis: 360°
Z-axis : 0~35 mm / Tilt-axis : 0~45°
Image Shift: ±150μm
MAX. SAMPLE SIZE
80 mm (Diameter) x 35 mm (Height)
AUTOMATION FUNCTION
Auto Start, Auto Focus, Auto Stigmator, Auto Contrast & Brightness
IMAGE FORMAT
BMP, JPEG, PNG, TIFF
VACUUM MODE
High Vacuum (Low Vacuum Option)
VACUUM PUMP
Rotary Pump
Turbo Molecular Pump (Full Automation)
DIMENSIONS
MAIN UNIT
Width: 390 mm
Depth: 380 mm
Height: 560 mm
Weight: 88 kg
CONTROLLER UNIT
Width: 390 mm
Depth: 325 mm
Height: 560 mm
Weight: 97 kg
ROTARY PUMP
Width: 400 mm
Depth: 160 mm
Height: 340 mm
Weight: 24 kg